A reference for people in both the metrology and processing communities who are engaged in research, development, or manufacturing. When possible the scientists and engineers writing the chapters have described the underlying science of measurement as well as its application to current materials and processes. They cover transistor fabrication metrology, on-chip interconnect metrology, lithography metrology, detecting and characterizing defects, sensor- based metrology, data management, electrical measurement-based statistical metrology, and key measurement and calibration technology.